一种用形状记忆合金薄膜驱动的新型微泵已经研制成功。为了进一步提高微泵性能 ,研究了微泵在不同驱动条件下的动态特性。结果表明 ,随着驱动电流和频率的增加 ,驱动膜有一个最大的位移值。占空比对最大位移的影响在有无流体情况下是不同的。微泵的流量不仅仅由驱动膜的位移决定 ,它还与驱动频率有关。在给定的频率下 ,位移越大 ,输出流量也越大。动态驱动过程中NiTi电阻的变化表明 ,形状记忆合金薄膜的马氏体 奥氏体相转变是不完全的。 A new micro pump driven by shape memory alloy thin film has been developed. In order to further improve the performance of the micro-pump, the dynamic characteristics of the micro-pump under different driving conditions were studied. The results show that with the increase of driving current and frequency, the driving diaphragm has a maximum displacement value. The effect of duty cycle on maximum displacement is different with or without fluid. Micropump flow rate is not only driven by the displacement of the film, it is also related to the drive frequency. At a given frequency, the greater the displacement, the greater the output flow. The change of NiTi resistance during dynamic driving indicates that martensitic austenite transformation of SMA film is incomplete.