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用磁控溅射法制备了不同Cr插层厚度的Co/Cr/Pd系列多层膜样品 .通过X射线衍射对该多层膜进行了结构分析 ;通过测定不同Cr层厚度多层膜的磁力图、磁滞回线 ,分析了垂直各向异性Ku 和矫顽力变化的原因 ;通过测定该多层膜体系的克尔谱及椭偏率谱 ,分析了克尔角变化的机理 ,认为克尔角随Cr插层厚度的增加而下降是由于Pd原子极化减弱所致
The Co / Cr / Pd multilayers samples with different Cr intercalation thicknesses were prepared by magnetron sputtering.The structure of the multilayers was analyzed by X-ray diffraction. The magnetic properties of the multilayers The hysteresis loop and the magnetic anisotropy were analyzed. The reason for the change of Ku and coercive force of the perpendicular anisotropy was analyzed. The Kerr spectrum and the ellipsometric spectrum of the multilayer system were analyzed. The mechanism of Kerr angle change was analyzed. Decline with the increase of Cr intercalation thickness is due to the decrease of Pd atom polarization