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对目前的几种软Ｘ射线光学元件的性能作了简要的阐述和分析．综合介绍了多层膜作为软Ｘ射线光学元件的新进展．同时对多层膜光栅这种新型软Ｘ射线光学元件的原理、性能、制作工艺进行了详细的说明
The performance of several soft X-ray optics has been briefly described and analyzed. The new progress of multilayer film as a soft X-ray optical element is introduced synthetically. At the same time, the principle, performance and manufacturing process of this new type of soft X-ray optical element with multilayer film grating are described in detail