【摘 要】
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A high-performance PMOSFET based on silicon material of hybrid orientation is obtained.Hybrid orientation wafers,integrated by(100) and(110) crystal orientation
【机 构】
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Science and Technology on Analog Integrated Circuit Laboratory,Sichuan Institute of Solid-State Circ
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A high-performance PMOSFET based on silicon material of hybrid orientation is obtained.Hybrid orientation wafers,integrated by(100) and(110) crystal orientation,are fabricated using silicon-silicon bonding, chemical mechanical polishing,etching silicon and non-selective expitaxy.A PMOSFET with W/L = 50μm/8μm is also processed,and the measured results show that the drain-source current and peak mobility of the PMOSFET are enhanced by up to 50.7%and 150%at V_(gs) =-15 V and V_(ds) =-0.5 V,respectively.The mobility values are higher than that reported in the literature.
A high-performance PMOSFET based on silicon material of hybrid orientation is obtained. Hybrid orientation wafers, integrated by (100) and (110) crystal orientation, are fabricated using silicon-silicon bonding, chemical mechanical polishing, etching silicon and non-selective expitaxy . A PMOSFET with W / L = 50 μm / 8 μm is also processed, and the measured results show that the drain-source current and peak mobility of the PMOSFET are enhanced by up to 50.7% and 150% at V gs = -15 V and V ds = -0.5 V, respectively. These mobility values are higher than that reported in the literature.
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