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用扫描隧道显微和光致发光方法，观察了发光多孔硅的微结构形貌．发现多孔硅的光致发光主要源自其最表面层；该层是无定型的，但又不同于一般的非晶硅，而像是由大量纳米尺度的硅原子族组成的海绵状微结构；诸硅原子簇随机分布，相互间没有清晰的界面；没有观察到“线”状或“柱”状的结构；多孔硅的微结构有明显的分形特征，其发光很可能是源自此纳米硅材料中的量子尺寸效应．
Scanning tunneling microscopy and photoluminescence were used to observe the microstructure of luminescent porous silicon. It was found that the photoluminescence of porous silicon is mainly derived from its outermost surface layer; this layer is amorphous, but different from the general amorphous silicon, like a sponge-like microstructure composed of a large number of nano-scale silicon atom groups; The clusters of silicon atoms are randomly distributed and have no clear interface with each other. No “line” or “pillar” structure is observed. The microstructure of porous silicon has obvious fractal characteristics, and its luminescence is likely to be derived from the nanosilica Quantum size effect in materials.