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采用氧等离子体辅助脉冲激光沉积方法(PLD)在硅衬底上,制备出高度(001)取向的钙钛矿相结构钛铌镁酸铅(PMN-PT)薄膜.研究了氧等离子体辅助对PMN-PT薄膜相结构、微观形貌和电学性能的影响.结果表明,通过在薄膜沉积过程中引入高活性的氧等离子,可以有效地提高PMN-PT薄膜的结晶质量和微观结构.未采用氧等离子体辅助PLD方法制备PMN-PT薄膜的介电常数(10 kHz)和剩余极化(2Pr)分别为1484和18μC/cm2,通过采用氧等离子体辅助,其介电常数和剩余极化分别提高至3012和38μC/cm2.
(001) oriented perovskite lead titanomagnesium titanate (PMN-PT) thin films were prepared by oxygen plasma assisted pulsed laser deposition (PLD) on silicon substrate.The effects of oxygen plasma-assisted deposition PMN-PT films.The results show that the introduction of high-activity oxygen plasma during the film deposition can effectively improve the crystal quality and microstructure of the PMN-PT films. The dielectric constant (10 kHz) and remanent polarization (2Pr) of PMN-PT films prepared by plasma-assisted PLD method are respectively 1484 and 18μC / cm2. With the help of oxygen plasma, the dielectric constant and remanent polarization of PMN- To 3012 and 38 C / cm2.