论文部分内容阅读
集成电路内各元件间的电隔离方法有许多种,这里介绍的是平面空气隔离法。这种方法利用平面技术使各元件完全隔离,可以说是一种空气隔离法,在实际应用中极为有效。其具体方法如图所示,下面以二极管阵
There are many ways to electrically isolate components within an integrated circuit. Here is a description of the flat air isolation method. This method uses planar technology to completely separate the components and can be said to be an air separation method that is extremely effective in practical applications. The specific method as shown, the following diode array