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随着半导体行业的日新月异的发展,生产工艺对半导体生产专用设备的要求也越来越高,如何生产出适应现在半导体行业需要的故障率低,运行稳定性高,维护成本低的设备成为现在设备生产厂家关注的问题。为此本文主要介绍了台达DVP系列PLC和ASD系列伺服系统在半导体硅片腐蚀清洗机中的应用并对选择伺服系统在本设备的作用和设计目的做了比较详细的阐述。该设备在用户的使用中是非常成功的。
With the rapid development of the semiconductor industry, the production process for semiconductor production equipment requirements are getting higher and higher, how to produce to meet the needs of the semiconductor industry now with low failure rate, high operating stability, low maintenance costs of equipment now become equipment Manufacturers concerned about the issue. For this reason, this paper mainly introduces the application of Delta DVP series PLC and ASD series servo system in the semiconductor wafer erosion cleaning machine and elaborates on the function and design purpose of the selected servo system in this equipment. The device is very successful in the user’s use.