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一、前言 薄膜制作技术有多种方法。本文只介绍采用真空技术的薄膜制作技术。最基本的薄膜制作法可大致分为两种,一种是选择除去法,另一种是附加法。 前者是在某种化合物存在固体表面时,只除去表面的特定原子,使表面形成与其内部异质的薄层,从而形成薄膜。该薄膜与其下部的物质附着性极好,但形成的薄膜和其基片材料受到很大制约,所以该法用得不多。
First, the preface There are many ways of film production technology. This article only describes the use of vacuum technology film production technology. The most basic film production method can be broadly divided into two kinds, one is the selective removal method, the other is the additional method. The former is a compound in the presence of a solid surface, remove only the surface of the specific atoms, the formation of the surface with its internal heterogeneous thin layer to form a thin film. The film has excellent adhesion to the underlying material, but the resulting film and its substrate material are greatly constrained so that the method is less commonly used.