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基于钽酸锂(LiTaO3)的热释电探测器具有灵敏度高、热释电系数大、响应范围宽等优点而被广泛应用于非分光红外气体检测.在LiTaO3热释电探测器制备过程中,采用预置沟槽方法制备出约20μm厚的超薄LiTaO3晶片,该方法既能控制晶片厚度又能实现自动解片,简化了探测器制备工艺;采用电喷雾方法制备出炭黑红外吸收层,该方法工艺简便,制备的吸收层分布均匀,结构疏松.电喷雾时间为20 min时制备的吸收层在常用气体吸收波段(2.5~10μm)的红外吸收率达98%以上,使探测器信号幅值提高了约2.6倍.热释电探测器性能测试结果表明:单元结构探测器的黑体探测率可达1.78×108cm·Hz1/2/W;二元补偿结构探测器信噪比为单元器件的2倍;将二元补偿结构探测器应用于非分光红外气体测试系统,进行了SO2气体检测,等噪声检测下限约为1×10-6.
Pyroelectric detectors based on lithium tantalate (LiTaO3) are widely used in non-spectroscopic infrared gas detection due to their advantages of high sensitivity, large pyroelectric coefficient and wide response range.In the preparation of LiTaO3 pyroelectric detectors, An ultrathin LiTaO3 wafer with a thickness of about 20μm was prepared by the pre-groove method. The method not only controlled the thickness of the wafer but also realized automatic chip disassembly, which simplified the preparation process of the detector. The infrared absorption layer of carbon black was prepared by electrospray method. The method has the advantages of simple process, uniform distribution of the absorption layer and loose structure, and the infrared absorption rate of the absorption layer (2.5-10 μm) in the commonly used gas absorption band (2.5~10 μm) prepared by electrospray time 20 min can make the signal amplitude of the detector The value of pyroelectric detector increased about 2.6 times.The results of pyroelectric detector performance test show that the detection rate of the blackbody of the unit structure detector can reach 1.78 × 108cm · Hz1 / 2 / W; the signal to noise ratio of the dual compensation structure detector is 2 times; the binary compensation structure detector used in non-spectroscopic infrared gas test system, the SO2 gas detection, such as noise detection limit of about 1 × 10-6.