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试验以T i2O3、T i3O5和T iO2作为初始膜料,在ZZS700-6/G型真空镀膜机上采用O2-离子束辅助蒸发制备氧化钛薄膜。用XRD检测方法确定各种膜料和薄膜的相成分,并全面的分析了各种膜料的蒸发特性和薄膜;用分光光度计测量薄膜的透射率,并分析薄膜的光学性能。试验表明,在采用T i2O3、T i3O5和T iO2作为蒸发制备氧化钛薄膜时,在钛的氧化物中存在T i3O5固态同一蒸发相;各种膜料在蒸发时,发生分解,熔池中的物质的成分逐渐转变并最终完全成同一蒸发相成分。
T i 2 O 3, T i 3 O 5 and TiO 2 were used as initial materials to prepare titanium oxide films on the ZZS700-6 / G vacuum coater with O2-ion beam assisted evaporation. The phase composition of various films and films was determined by XRD. The evaporation characteristics and films of various films were analyzed comprehensively. The transmittance of films was measured by spectrophotometer and the optical properties of films were analyzed. Experiments show that the Ti 1 O 3, Ti 3 O 5 and Ti 2 O 2 as the evaporation of the preparation of titanium oxide film, there is Ti 1 O 3 in the titanium oxide solid phase evaporation; various film material in the evaporation, the decomposition of molten pool The material composition gradually changes and eventually becomes completely the same evaporation phase composition.