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Ｔｉ＋（１００ｋｅＶ，３×１０１７ｃｍ－２）注入Ｈ１３钢，表面注入层的化学组成和微观结构发生了很大的变化，俄歇分析表明，注入元素Ｔｉ在钢表面层的剖面含量分布呈近似高斯分布，在４０ｎｍ处原子数分数达到其峰值（２５％），离子束真空碳化导致在钢的表面形成一层约２０ｎｍ的“渗碳层”。透射电镜分析表明，表面层的微观形貌由注入前的板条状马氏体结构转变成注入后的微胞状结构，电子衍射则进一步证实，表面层已出现非晶化，并且有ＴｉＣ析出
The chemical composition and microstructure of the surface injection layer have been greatly changed when Ti + (100keV, 3 × 1017cm-2) is injected into the H13 steel. The Auger analysis shows that the cross-sectional content distribution of Ti in the steel surface layer has an approximate Gaussian distribution At 40 nm the atomic fraction reaches its peak (25%) and the ion beam vacuum carbonization results in the formation of a “carburized layer” of about 20 nm on the surface of the steel. Transmission electron microscopy analysis showed that the microstructure of the surface layer was changed from the lath martensite structure before injection to the microcellular structure after injection. Electron diffraction further confirmed that the surface layer was amorphized and TiC was precipitated