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NEC、日立在ISSCC上发表1GDRAM据ISSCC’95的发表内容,NEC、日立已经在世界上率先开发了1GDRAM。NEC开发的1GDRAM的特点是,采用0.2μm电子束曝光技术和钽氧化膜低温(500℃)工艺技术以0.25μmCMOS工艺,存贮单...
NEC, Hitachi Published 1GDRAM at ISSCC According to the publication of ISSCC’95, NEC and Hitachi have pioneered the development of 1GDRAM in the world. NEC developed 1GDRAM is characterized by the use of 0.2μm electron beam exposure technology and tantalum oxide film low temperature (500 ℃) process technology to 0.25μmCMOS process, ...