论文部分内容阅读
斯托克斯椭偏仪可快速测量光束的偏振态,仪器矩阵的精确测量是斯托克斯椭偏仪一项非常重要的技术。为提高仪器矩阵的测量精度,基于四点定标法,提出了斯托克斯椭偏测量系统的多点定标法,并从理论上证明了该方法。在多点定标法的基础上采用六点定标法进行实验验证,结果表明采用多点定标法对系统定标是完全可行的,为斯托克斯椭偏仪的定标提供了新思路。同时六点定标法比四点定标法以及E-P定标法所获得的仪器矩阵更准确,在测量精度方面,该方法获得的斯托克斯参数的总均方根(RMS)偏差为3.15%。
Stokes ellipsometer can quickly measure the polarization state of light beam. The accurate measurement of instrument matrix is a very important technique of Stokes ellipsometer. In order to improve the measurement accuracy of the instrument matrix, a multi-point calibration method based on four-point calibration method is proposed for Stokes ellipsometry system, and the method is proved theoretically. Based on the multi-point calibration method, the six-point calibration method was used to verify the experimental results. The results show that it is feasible to calibrate the system by multi-point calibration and provide a new calibration for Stokes ellipsometer Ideas. At the same time, the six-point calibration method is more accurate than the four-point calibration method and the EP calibration method. The total root mean square error (RMS) of the Stokes parameters obtained by this method is 3.15 %.