钛酸盐系铁电材料多具有高介电常数和优良的压电性能,以往人们多着重研究和应用这些效应,但随着技术的发展对铁电材料的电光、声光、热电等效应逐步和加深了认识,如何充分利用铁电材料多功能效应研制在新技术发展中极感兴趣的各种新型功能(或多功能)器件引起了极大的重视,但遗憾的是应用固态材料的多功能效应往往受到很多技术上的限制,诸如要高的电压驱动,难以获得均匀的大面积块体,也难于实现近代电子器件的高集成化等等要求,而薄膜技术的发展为充分利用铁电材料的多功能效应创造了有利条件。诚然,要求生长出的铁电薄膜达到实用化仍有不少问题,但近几年来在铁电、压电薄膜材料研究方面巳做了大量工作,主要在以下几个方面 Titanate-based ferroelectric materials with high dielectric constant and excellent piezoelectric properties, in the past more emphasis on the study and application of these effects, but with the development of technology on the ferroelectric materials electro-optic, acousto-optic, thermoelectric and other effects gradually And deepen the understanding of how to make full use of the multi-functional effect of ferroelectric materials to develop new functional (or multi-functional) devices that are of great interest in the development of new technologies has drawn great attention, but unfortunately the application of solid materials Functional effects are often subject to many technical limitations, such as high voltage drive, it is difficult to obtain a uniform large area of ​​the block, it is difficult to achieve high integration of modern electronic devices and so on, and the development of thin film technology to make full use of ferroelectric The multifunctional effect of the material creates favorable conditions. Of course, there are still many problems that require the growth of ferroelectric thin films to be put into practical use. However, a great deal of work has been done in the field of ferroelectric and piezoelectric thin film materials in recent years, mainly in the following aspects