【摘 要】
：
In this work,based on physical vapor deposition and high-temperature annealing (HTA),the 4-inch crack-free high-quality AIN template is initialized.Benefiting from the crystal recrystallization during the HTA process,the FWHMs of X-ray rock-ing curves for
【机 构】
：
State Key Laboratory of Artificial Microstructure and Mesoscopic Physics School of Physics,Nano-Opto
论文部分内容阅读
In this work,based on physical vapor deposition and high-temperature annealing (HTA),the 4-inch crack-free high-quality AIN template is initialized.Benefiting from the crystal recrystallization during the HTA process,the FWHMs of X-ray rock-ing curves for (002) and (102) planes are encouragingly decreased to 62 and 282 arcsec,respectively.On such an AIN template,an ultra-thin AIN with a thickness of ～700 nm grown by MOCVD shows good quality,thus avoiding the epitaxial lateral over-growth (ELOG) process in which 3-4μm AIN is essential to obtain the flat surface and high crystalline quality.The 4-inch scaled wafer provides an avenue to match UVC-LED with the fabrication process of traditional GaN-based blue LED,therefore signific-antly improving yields and decreasing cost.
其他文献
Organic-inorganic hybrid perovskite semiconductors pos-sessing superior optoelectronic properties (e.g.long carrier dif-fusion lengths,high optical absorption coefficient,low ex-citon binding energy,and high defect tolerance) are attract-ing serious atten
With great achievements in efficiency,stability,and large-scale preparation of perovskite solar cells (PSCs),the com-mercialization of PSC is ongoing,but there is still an issue on lead toxicity.Although lead content in the device is low,the water solubil
It has been widely discussed whether long-range magnet-ic order could exist in low-dimensional (d ＜ 3) systems.Early studies,like Hohenberg-Mermin-Wagner theorem based on the Heisenberg model of magnetism,incline to a negative con-clusion,as the thermal f
Multijunction solar cells are the highest efficiency photovoltaic devices yet demonstrated for both space and terrestri-al applications.In recent years five-junction cells based on the direct semiconductor bonding technique (SBT),demonstrates space effici
A two-dimensional (2D) MA2Z4 family with α andβ phases has been attracting tremendous interest,the MoSi2N4 and WSi2N4 of which have been successfully fabricated (Science 369,670 (2020)).Janus monolayers have been achieved in many 2D families,so it is inte
Crystalline cubic cerium oxide nano particles have been synthesized from cerium (Ⅲ) nitrate (Ce (NO3)3.6H2O) and sodi-um hydroxide by a hydrothermal method.The effect of three different molar ratios of the NaOH precipitating agent on structur-al,optical,a
Owing to the high carrier mobility,two-dimensional (2D) gallium antimonite (GaSb) is a promising channel material for field-effect transistors (FETs) in the post-silicon era.We investigated the ballistic performance of the 2D GaSb metal-oxide-semiconducto
近日,中共中央办公厅、国务院办公厅印发了《农村人居环境整治提升五年行动方案( 2021 -2025年)》,并发出通知,要求各地区各部门结合实际认真贯彻落实.
State-of-the-art AlGaN/GaN high electron mobility structures were grown on semi-insulating 4H-SiC substrates by MOCVD and X-band microwave power high electron mobility transistors were fabricated and characterized.Hall mobility of 2291.1 cm2/(V·s) and two
Plasmonic nanolaser as a new type of ultra-small laser,has gain wide interests due to its breaking diffraction limit of light and fast carrier dynamics characters.Normally,the main problem that need to be solved for plasmonic nanolaser is high loss induce