【摘 要】
：
Ceramic films with high values of ferroelectricity,piezoelectricity and dielectricity with perovskite structure,like lead-zirconate-titanate(PZT,PbZrxTi1-xO
【机 构】
：
Department of Microsystems Engineering,University Freiburg,Freiburg,Germany
【出 处】
：
The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会)
论文部分内容阅读
Ceramic films with high values of ferroelectricity,piezoelectricity and dielectricity with perovskite structure,like lead-zirconate-titanate(PZT,PbZrxTi1-xO3),lead strontium titanate(PST,PbxSr1-xTiO3)and barium strontium titanate(BST,BaxSr1-xTiO3)films,are widely used in the fields of sensors,energy harvesting,capacitors and FERAMs.Here a novel,very easy way to produce micro patterned perovskite ceramic thin films on silicon substrates by direct UV-lithography is presented.This process has several advantages compared to other methods using photopolymerizable monomers for directly UV-photopatternable ceramic films.
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