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Ignition bridgeflmsis an important component of electro-explosive devices,which canbe wildly used in military,aerospace ans mining feldset al.TaN thin flms with the nature of thegood high temperature stability and low temperature coeffcient of resistance is a good candidate for ignition bridge flms.In this paper,2-μm-thick TaN thin flm was desposited by DC reactive magnetron sputtering onto a 3 inch Al2O3ceramic substrate.Then,TaN thin flms ignitionbridges were prepared by lithography-wet etch process.The infuences of corrosion parameters on the corrosion rate and lateral erosion of TaN thin flms were investigated.The results show that the optimal corrosionparameters are 30℃C of the solution temperature,0.5 of the HNO3/HF solution volume ratio,no deionized water is added.Under the optimal corrosionparameters,the etch rate and the lateral erosion of the TaN thin-flm are about 6μm/min and about 5μm,respectively.The dimensions of TaN thin-flm bridges are 60μm(l)×30μm(w)×2μm(h),and the resistance of the ignition bridge is about 2Ω.The results of the samples tested bythe capacitor discharge show that the input ignition energy is about 20mJ,the ignition delay time is about 60μs,the ignition sparkles heightis about 6mm,the highest electrical-explosion temperature is about 4000K.