【摘 要】
：
The fabrication of nanotechnology enabled devices requires not only the creation and fuuctionalization of well defined nanostructures, but also practical ro
【机 构】
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University of Massachusetts,USA
【出 处】
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The 5th Sino-US joint Conference of Chemical Engineering(第五届
论文部分内容阅读
The fabrication of nanotechnology enabled devices requires not only the creation and fuuctionalization of well defined nanostructures, but also practical routes for the two and three dimensional integration of these structures with components and systems across multiple length scales.Approaches for the use of self-assembled block copolymer templates to achieve these goals for sub-10 nm elements using either Si wafer or roll to roll processing platforms will be discussed.
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