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传统方法制作可调光栅,工艺条件苛刻,制作过程复杂且难以控制,制作成本高,周期较长,因此提出一种制作光栅的新方法。通过氧等离子体(PLASMA)方法,制作出微米尺度的光栅结构。利用PLASMA时间的可控性和聚二甲基硅氧烷(PDMS)优异的弹性,通过调控PLASMA的时间和PDMS的拉伸程度,制得所需尺寸的光栅。将制得的光栅薄膜沿着光栅栅线的方向拉伸,随着栅线的伸长,光栅常数随之减小,即可对光栅周期进行连续、任意调谐,并获得预定的目标周期。实验结果表明,制作的光栅调谐范围可达40%,并且调谐过程中光栅金属保持完整,衍射角变化显著,理论值与实验值基本一致,达到预期实验目的。该制作可调光栅的方法成本低,周期短,工艺过程简单易控制,可广泛应用于微型光谱仪、扫描仪及光通信等领域。
The traditional method of making adjustable grating, harsh process conditions, the production process is complicated and difficult to control, the production cost is high, the cycle is longer, so a new method of making grating. A grating structure of micron scale was fabricated by oxygen plasma (PLASMA) method. Utilizing the controllability of PLASMA time and the excellent elasticity of polydimethylsiloxane (PDMS), a grating of the desired size is fabricated by controlling the time of PLASMA and the degree of stretching of PDMS. The obtained grating film is stretched in the grating grating line direction, and as the grating line grows, the grating constant decreases, and the grating period can be continuously and arbitrarily tuned and a predetermined target period can be obtained. The experimental results show that the tuning range of the grating is up to 40%, and the grating metal remains intact during the tuning process. The diffraction angle changes significantly. The theoretical and experimental values are basically the same, which achieves the expected experimental purpose. The method for making the adjustable grating has the advantages of low cost, short cycle and simple and easy process control, and can be widely applied in the fields of micro-spectrometer, scanner and optical communication.