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针对非球面零件光学级检测技术进行广泛探讨,并针对课题研究中一抛物面镜实例,设计出实用型Dall补偿器,经优化后,保证检测面形精度达到0.004λλ=632.8nm。
Aiming at the problem of a parabolic mirror in the research, a practical Dall compensator is designed for the optical grade detection of aspheric components. After optimization, the accuracy of the detection surface is guaranteed to be 0.004λλ = 632.8nm.