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提出了一种新的半导体激光定位技术。把半导体激光器的线性调频特性和双波长细分技术结合起来,用两个半导体激光器完成了零点的高精度动态定位,突破了传统白光定位的局限,简化了干涉仪的设计,实现了大范围的零点捕捉。定位精度达到0.01μm。
A new semiconductor laser positioning technology is proposed. Combining the chirp characteristics of semiconductor lasers and the two-wavelength subdivision technique, the high-precision zero-point dynamic positioning is achieved by using two semiconductor lasers, which breaks through the limitation of traditional white light positioning and simplifies the design of the interferometer, thus realizing a wide range of Zero capture. Positioning accuracy of 0.01μm.