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引言调制盘在红外搜索跟踪系统中起着主要作用,它既能提供运动目标的位置信息,又能滤去强烈的背景辐射,使系统信噪比大大提高。它的制造工艺采用光刻技术。光刻是一种复印图象同化学腐蚀相结合的综合性技术,它先采用照相复印的方法,将光刻母版上的图形精确地复印在涂有感光胶的金属层上,然后利用光刻胶的保护作用对金属层进行选择性化学腐蚀,从而在金属层上得到与光刻胶相应的图案,目前采用的光刻方法是接触曝光法。
Introduction Modulation disk plays a major role in infrared search and tracking system. It not only provides position information of moving targets, but also filters out strong background radiation and greatly improves signal-to-noise ratio of the system. Its manufacturing process uses lithography. Photolithography is a comprehensive technology combining photocopy with chemical etching. It first uses photographic methods to accurately copy the pattern on the photolithographic master onto the photoresist-coated metal layer and then uses light The protective effect of the photoresist selectively carries out chemical etching on the metal layer to obtain a pattern corresponding to the photoresist on the metal layer. The current lithography method is the contact exposure method.