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本文对用加速器法（ＣＡＤ）在９Ｃｒ１８不锈轴承钢上制备的无氢类金刚石膜（ＨＦＤＬＣ）样品进行了显微硬度测试、摩擦磨损试验、激光扫描显微镜（ＬＳＭ）观察和透射电镜（ＴＥＭ）分析。试验结果表明用该工艺方法制备的ＨＦＤＬＣ膜具有非晶态显微结构，硬度极高，摩擦磨损性能优异。
In this paper, the microhardness test, friction and wear test, laser scanning microscopy (LSM) observation and transmission electron microscopy (TEM) were carried out on a sample of HFDLC prepared by 9Cr18 stainless steel using accelerator (CAD) analysis. The test results show that the HFDLC film prepared by this method has an amorphous microstructure with extremely high hardness and excellent friction and wear properties.