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为了解决双通单平行光栅对压缩器构型里光栅失调问题,设计了一套结构简单的监测系统方案,根据系统结构进行数值模拟,通过模拟分析提出了一种新的光栅在线调节方法。考虑两块光栅不同维度的失调量,结合模拟得出监测量与失调量的关系,根据监测量变化将失调量一一分离调节,最后将真空室中的失调光栅调回理想位置。对该方法进行了误差和可行性分析,根据压缩器构型参数,得到调节精度范围为0.30~2.78μrad。
In order to solve the problem of grating misalignment in the configuration of compressor with double parallel single grating, a set of simple monitoring system was designed. According to the system structure, a numerical simulation method was proposed. A new grating online adjustment method was proposed. Considering the imbalance between the two gratings in different dimensions, the relationship between the amount of monitoring and the amount of offset is obtained by simulation. The amount of offset is adjusted and adjusted one by one according to the change of the monitoring amount. Finally, the offset grating in the vacuum chamber is adjusted back to the ideal position. The error and feasibility of this method are analyzed. According to the configuration parameters of the compressor, the accuracy of the adjustment is 0.30 ~ 2.78μrad.