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众所周知,金刚石非常有用,但在某些工业领域里,比如半导体工业或光学工业中,需要金刚石薄膜。到目前为止,虽很少制得真正的金刚石薄膜,却也获得了很大的进展。采用等离子体淀积技术或离子束工艺已制备出了类金刚石的碳膜,这种碳膜也可称它为菱形碳膜或无定形碳膜。其电阻率可达10~(12)Ω·cm,折射率为1.9～2.0,在2～20μm间没有严重的吸收带,莫氏硬度达8级。用它作锗的增透膜,锗片厚度为1mm,在10.6μm处透射率可达93～95％。一、制备类金刚石碳膜的几种方法热分解淀积在低压下热分解烃气使碳沉
It is well known that diamond is very useful, but in some industries, such as the semiconductor industry or the optical industry, diamond films are needed. So far, though very few diamond films have been made, great progress has been made. Diamond-like carbon films have been prepared using plasma deposition techniques or ion-beam techniques and may also be referred to as rhombic carbon films or amorphous carbon films. Its resistivity can reach 10 ~ (12) Ω · cm, refractive index is 1.9 ~ 2.0, there is no serious absorption band between 2 ~ 20μm, Mohs hardness reaches 8 grade. It is used as antireflection coating of germanium. The thickness of germanium is 1mm, and the transmittance of 93.65% at 10.6μm. First, the preparation of diamond-like carbon film several methods Thermal decomposition deposition under low pressure thermal decomposition of hydrocarbon gas so that carbon