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针对工业型扫描探针显微镜(SPM)在大尺寸晶圆样品检测中对扫描区域进行粗定位的需要,提出了一种基于数字图像处理的快速定位方法.该方法首先实现对样品表面的快速自动聚焦,之后利用图像匹配技术寻找样品表面的定位标记,最后通过坐标变换得到各待测区域在系统坐标系下的位置.根据晶圆样品表面的特征,在自动聚焦过程中选取Robert算子作为聚焦评价函数,并以变步长的爬坡策略搜索焦平面;在图像匹配过程中采用SURF算法提取图像上的标记特征,并利用双向匹配方式提高匹配准确性.实验表明,采用该方法实现粗定位耗时小于30s,定位误差小于5μm.
In order to meet the need of coarse positioning of scanning area in large-scale wafer sample inspection by industrial scanning probe microscope (SPM), a fast positioning method based on digital image processing is proposed. The method firstly realizes the fast automatic Focus, and then use the image matching technology to find the positioning mark on the surface of the sample, and finally get the position of each test area in the system coordinate system by coordinate transformation.According to the characteristics of the wafer sample surface, Robert operator is selected as the focus The function is evaluated and the focal plane is searched by step-climbing strategy. SURF algorithm is used to extract the feature of the image in the process of image matching, and the matching accuracy is improved by bidirectional matching.Experiments show that this method can achieve coarse positioning Time-consuming less than 30s, positioning error of less than 5μm.