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在对不同有机溶剂分子结构分析的基础上 ,选取甲醇、DMF(N ,N 二甲基甲酰胺 )和乙腈溶液为碳源 ,以脉冲直流电源电解有机溶液的方法在Si片上制得了含氢类金刚石薄膜 (DLC薄膜 ) ,并研究了退火对薄膜结构的影响 .通过X射线光电子能谱 (XPS) ,喇曼 (Raman)和红外 (IR)光谱对薄膜的结构进行了分析表征 .XPS表明薄膜的主要成分为C ,喇曼光谱显示所得薄膜为典型DLC薄膜 .喇曼和红外光谱还表明 ,膜中含有大量H并且主要键合于sp3碳处 .随着退火的进行薄膜中的H被去除 .随温度升高薄膜电阻率的下降及喇曼峰形和峰位置的变化表明 ,C的价键结构逐渐从sp3转化为sp2 结构 ,即薄膜经历了一石墨化过程 .通过三种溶液中所得薄膜的物理性能和各谱图特征几乎相同的事实和对三种溶液分子结构的比较推测 ,甲基为此液相制备DLC薄膜法的功能团 ,更有效的C源可从高介电常量的含甲基极性溶剂中选取
Based on the analysis of molecular structure of different organic solvents, methanol, DMF (N, N-dimethylformamide) and acetonitrile were selected as carbon sources and hydrogen-containing Diamond film (DLC film) was prepared and the effect of annealing on the structure of the film was studied.The structure of the film was analyzed by X-ray photoelectron spectroscopy (XPS), Raman and infrared (IR) The main component is C. The Raman spectrum shows that the resulting film is a typical DLC film.The Raman and infrared spectra also show that the film contains a large amount of H and is mainly bonded to the sp3 carbon.H is removed from the film as the annealing progresses .The decrease of film resistivity and the change of Raman peak shape and peak position with increasing temperature show that the valence bond structure of C gradually changes from sp3 to sp2 structure, that is, the film has undergone a graphitization process.From the results of three solutions The fact that the physical properties and the spectral characteristics of the films are almost the same and the comparison of the molecular structures of the three solutions suggests that the methyl group is a functional group for preparing the DLC film method for this liquid phase and the more effective C source can be obtained from a high dielectric constant Contains A polar solvent selected group