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研究了微波电子回旋共振－化学气相沉积ＳｉＮｘ薄膜的光学性能，这种ＳｉＮｘ薄膜具有透光谱宽、透光率高的特点，总结了透光谱、折射率、光隙能随微波功率、基片温度的变化关系
The optical properties of SiNx thin films were studied. The SiNx thin films have the characteristics of wide transmission spectrum and high light transmittance. The effects of microwave power, substrate temperature The relationship between the changes