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一、引言为了获得大功率微波晶体管,采用了多芯片混合内联技术和引线键合技术。用混合形式制造的器件价值是昂贵的。本工作的目的是建立和验证在小批试制中成批生产单片器件的制造技术。这种技术已在近三年中根据 No.00014-75-C-0405号合同在 NRL 的资助下进行了研究。为了验汪单片制造技术,本工作将进行两种微波晶体管即单片2千兆赫20瓦和4千
First, the introduction In order to obtain high-power microwave transistors, using a multi-chip hybrid inline technology and wire bonding technology. Devices fabricated in a hybrid form are expensive. The purpose of this work is to establish and validate the manufacturing techniques for mass-producing monolithic devices in a small batch of prototypes. This technology has been studied under NRL funding under No.00014-75-C-0405 contracts in the last three years. In order to test Wang monolithic manufacturing technology, this work will be conducted two microwave transistors that monolithic 2 GHz 20 watts and 4 thousand