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声表面波(SAW)器件是VHF-UHF频段中信息和传输系统的高性能关键器件.SAW器件用基片材料,包括压电常数和声速大的在蓝宝石上外延生长的ZnO单晶薄膜、温度稳定性好的石英和控制元件分散性实现高精度的SiO_2薄膜等.由于采用了三个换能器结构、抽指加权和假电极指等设计法,获得了高Q、低损耗、高稳定和高精度的SAW器件.这些器件和电路元件混合集成,可制成小型的滤波器、振荡器和FM解调器并应用于CATV、卫星广播、汽车电话和TV调谐器等方面.
Surface acoustic wave (SAW) devices are high performance key devices for information and transmission systems in the VHF-UHF band.SAW device substrate materials, including ZnO single crystal thin films epitaxially grown on sapphire with piezoelectric constant and sonic velocity, temperature Good stability of the quartz and control element dispersion to achieve high-precision SiO_2 film, etc .. As a result of three transducer structure, fingering weighted and fake electrode finger and other design methods, access to high Q, low loss, high stability and Precision SAW devices that are mixed and integrated with circuit components to make small filters, oscillators and FM demodulators for use in CATV, satellite radio, car phones and TV tuners.