利用Fluent软件,以N-S方程和RNGκ-ε模型为基础,采用离散相模型,对风刀吹扫去除传输镜表面颗粒物污染物的流场,以及吹扫去除过程中颗粒物的运动轨迹进行了模拟,并基于模拟仿真结果搭建了颗粒物污染捕捉和收集的装置,最终提高了传输镜表面污染物的清除效率和洁净度,并且在一定程度上避免了吹扫过程中污染物颗粒进入周围环境以造成对其他光学元器件的污染。 Based on the NS equations and the RNGκ-ε model, a discrete phase model is used to simulate the flow field of pollutants on the surface of the transmission mirror by the air knife purge and the trajectories of the particles during the purging and removing process. And based on the simulation results, a device for capturing and collecting the particulate matter pollution is built up, which finally improves the removal efficiency and cleanliness of the pollutants on the surface of the transmission mirror, and to a certain extent, prevents the pollutant particles from entering the surrounding environment during the purging process to cause the Other optical components of the pollution.