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用斜置的四探针方法 ,依靠显微镜观察 ,将针尖置于微区图形的四个角区 ,用改进的范德堡公式可以得到微区的薄层电阻。文中对测准条件作了分析。并用该仪器测定了硼扩散片的薄层电阻分布。在测试过程中应用微处理器 ,加快了计算速度
With oblique four-probe method, relying on the microscope observation, the tip is placed in the four corners of the micro-area pattern, and the sheet resistance of the micro-area can be obtained by the modified Vanderbilt formula. The paper analyzes the conditions of the calibration. The apparatus was used to measure the sheet resistance distribution of boron diffuser. The application of microprocessors in the testing process, speeding up the calculation speed