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The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of 80 μm is presented. A probe is used for low-coherence interferometry to conduct highly precise measurements of form deviations of small boreholes. Measurements conducted in nozzles are also presented. The results prove the potential of the fiber-optical sensor for quality inspection of high-precision parts, such as injection nozzles, for common-rail diesel engines.
The measurement of boreholes with diameters smaller than 500 μm is a demanding task that can not be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of 80 μm is presented. A probe is used for low-coherence interferometry to conduct highly precise measurements of form deviations of small boreholes. Measurements conducted in rods are also presented. The results prove the potential of the fiber-optical sensor for quality inspection of high-precision parts, such as injection nozzles, for common-rail diesel engines.