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激光跟踪仪是一种用于大尺寸空间精密几何坐标测量的重要光学测量仪器。PSD是激光跟踪仪实现对合作目标精密跟踪的脱靶量传感器件,其探测精度直接影响跟踪测量性能。首先,简要介绍了激光跟踪测量系统及基工作原理,然后根据系统需求提出了脱靶量精密探测方案。重点讨论了I/V变换、信号放大、滤波、参数匹配等硬件设计方法以提高PSD输出微弱电流信号的稳定性,研究提出了基于FPGA和有限状态机的去极值平均滤波算法和扩展除法运算算法分别用于降低噪声干扰与提高测量精度;数据表明在4mm×4mm的区域内脱靶量探测稳定度优于±2μm。采用该方法实现激光跟踪仪对合作目标的动态跟踪,很好地满足了激光跟踪仪的精密快速跟踪需要。
Laser tracker is an important optical measuring instrument for precision geometric coordinate measurement in large-size space. PSD is a laser tracking device to achieve the goal of precision tracking partner miss distance sensor, the detection accuracy of a direct impact on tracking measurement performance. First of all, a brief introduction of the laser tracking measurement system and the working principle of the base is given, and then a precise miss detection scheme is proposed according to the system requirements. The hardware design methods such as I / V transform, signal amplification, filtering and parameter matching are mainly discussed in order to improve the stability of PSD output weak current signal. The extremum average filtering algorithm and extended division algorithm based on FPGA and finite state machine The algorithm is used to reduce the noise interference and improve the measurement accuracy respectively. The data show that the detection accuracy of the miss distance in the area of 4mm × 4mm is better than ± 2μm. Using this method to achieve the dynamic tracking of the laser tracker to the cooperation target, well meet the needs of the laser tracker precision fast tracking.