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引言固体工艺已进展到目前可能制成具有高分辨率图象传感功能的硅光电探测器集成阵列。固体图象传感器有多方面的应用,如图象辨认、复印或光电阅读器、图象跟踪、实时监视及精密度量学。虽然已经研究了制造固体图象传感器的一些途径,但我们认为从性能及易于制造的角度来说,最有希望的是以光通量积分模式工作的硅光电晶体管阵列。
Introduction Solid state processes have progressed to the point where an integrated array of silicon photodetectors with high-resolution image sensing capabilities is currently possible. Solid-state image sensors have many applications, such as image recognition, photocopying or photoelectric readers, image tracking, real-time monitoring and precision metrology. Although some approaches to fabricating solid state image sensors have been studied, we believe that the most promising from the point of view of performance and ease of manufacture is a silicon phototransistor array that operates in a luminous flux integration mode.