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ADI公司在慕尼黑近期举办的Elec-tronica展览会上宣布的iCMOS模块化工艺,引起了人们的重视。它标志着模拟技术在整个微电子技术中的作用越来越大,影响也越来越大。过去,数字式电路(包括存储器,CPU,MCU,以及逻辑电路)一直是推动集成电路工艺加工技术发展进步的主要动力;模拟电路的制造一般比最先进的工艺要落后一两代。而iCMOS模块化工艺则是将主流的亚微米加工工艺和模拟集成电路所特别需要的加工工艺融合在一起了。这是半导体产业界的工艺与器件研究开发人员经过多年努力获得的成果。除了ADI公司以外,其它的一些IDM公司,以及代工企业在这个方面也已经获得成果。除了在工业电子方面连接传感器,驱动执行装置以外;在照明工程,光电技术产品,以及能量变换等方面也有广泛应用。例如,位于奥地利维也纳的Austriamicrosys-tems公司,既自主开发自有的产品,也作为代工厂为其它设计公司加工集成电路。它所掌握的H35工艺,是以350nm标准的CMOS工艺技术为基础,开发成功的高压BiCMOS工艺,可以涵盖20和50VMOS器件,双极型器件,和高精度电阻和电容。并且计划将高压器件扩展到120V。值得设计公司注意的是它接受大学,研究所和工厂的委托加工。并且开展MPW加工,我国也有大学委托加工所设计的芯片。据了解,它的H35工艺已经经过汽车电子的可靠性鉴定。能够具有类似指标产品的其它公司还有:位于加拿大,魁白克的GoalSemiconductor公司,它所生产的HVDAC200,是一件9-位DAC。电压可达200V。可以提供电压达到40V以上的模拟集成电路的公司有;位于美国阿利桑拿州Tucson的ApexMicrotechnology公司;以及松下移动通信公司;Na-tionalSemiconductor公司等。这一动向值得我们关注
ADI’s recently announced iCMOS modular process at the Elec-tronica exhibition in Munich has aroused people’s attention. It marks the simulation technology in the entire microelectronics role in the growing, the impact is also growing. In the past, digital circuits (including memories, CPUs, MCUs, and logic circuits) have been the main driving force behind the development of integrated circuit technology. Analog circuits are generally one or two generations behind the most advanced technologies. The iCMOS modular process, on the other hand, blends the mainstream submicron processing technology with the processing technologies that are specifically needed for analog ICs. This is the result of years of hard work by process and device developers in the semiconductor industry. In addition to Analog Devices, other IDM companies, as well as foundries, have also achieved results in this area. In addition to connecting industrial sensors and sensors, driving actuators, lighting engineering, optoelectronic products, and energy conversion are also widely used. Austriamicrosystems, for example, in Vienna, Austria, develops its own products on its own and also acts as a foundry to process integrated circuits for other design houses. The H35 process it masters is based on the 350nm standard CMOS process technology and has developed a successful high voltage BiCMOS process that covers 20 and 50VMOS devices, bipolar devices, and precision resistors and capacitors. And plans to expand the high-voltage devices to 120V. It is worth to note that the design company is entrusted with the processing of universities, research institutes and factories. And to carry out MPW processing, China also has the university commissioned by the chip design. It is understood that its H35 process has been identified by the reliability of automotive electronics. Other companies that can offer similar metrics include GoalSemiconductor in Québec, Canada, which makes the HVDAC200, a 9-bit DAC. Voltage up to 200V. Companies that can supply analog ICs up to 40V are Apex Microtechnology in Tucson, Ariz., USA; and Matsushita Mobile Communications and Na- tionalSemiconductor. This trend deserves our attention