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分析了全息光学头中的关键元件HOE的衍射效率与位相量化噪声,通过槽纹轮廓结构参数优化与改善工艺提高衍射效率,实现HOE元件的实用化.
The diffraction efficiency and phase quantization noise of the key element HOE in the holographic optical head are analyzed. The diffraction efficiency is improved through the optimization of structure parameters of the groove profile and the improvement process, and the HOE element is put into practical use.