论文部分内容阅读
利用UV-LIGA技术制作毫米波腔体滤波器SU-8主模结构,通过聚二甲基硅氧烷(PDMS)对所制作的SU-8主模结构进行一次复制,得到多个相同的负模结构,将负模结构浸泡在羟丙基甲基纤维素(HPMC)溶液中进行表面防粘处理。处理后,使用PDMS-PDMS软光刻技术和NOA73紫外固化技术进行二次复制,得到PDMS和NOA73材料的毫米波腔体滤波器。对快速复制出的滤波器的表面形貌、结构尺寸进行观测,对其电磁性能(中心频率、带宽、插损和回波损耗)进行测试。结果显示,该方法制备出的毫米波滤波器具有较好的电磁性能。采用该方法制作的毫米波腔体滤波器具有生产周期短、成本低、效率高和结构可靠的特点。
The UV-LIGA technology was used to fabricate the SU-8 master structure of the millimeter wave cavity filter. The SU-8 master structure was replicated by polydimethylsiloxane (PDMS) to obtain the same number of negative Mold structure, the negative mold structure soaked in hydroxypropyl methyl cellulose (HPMC) solution for surface release treatment. After treatment, PDMS-PDMS soft lithography and NOA73 UV curing were used for secondary replication to obtain millimeter wave cavity filters of PDMS and NOA73 materials. The surface morphology and structure dimensions of the rapidly replicated filter were observed and their electromagnetic properties (center frequency, bandwidth, insertion loss and return loss) were tested. The results show that the proposed millimeter-wave filter has good electromagnetic performance. The millimeter wave cavity filter manufactured by the method has the characteristics of short production period, low cost, high efficiency and reliable structure.