目前,洁净室要达到3级洁净度(含尘浓度在3粒/升以下)已不是困难的事,比这等级更高的洁净室,在国内外亦有出现。对这种高洁净度洁净室如何进行评定,本文提出初步看法供讨论。当然其基本原则对于其他级别洁净室也是适用的。在评定洁净室达到什么级别的时候,必须从三方面考虑: 1.粒子计数器的检测容量——也就是平时所说的采样量——够不够; 2.测定次数或点数够不够; 3.对测定数据的评定标准。下面分析讨论。 1.关于粒子计数器的最小检测容量实践已经发现,大检测容量的计数器和小检测容量的计数器,在测定高洁净度(3级以上)时有较大差别。最近外国文献也 At present, it is not difficult for the clean room to achieve Class 3 cleanliness (dust concentration below 3 grains per liter). Cleanrooms higher than this level are also present at home and abroad. How to evaluate this kind of high cleanliness clean room, this article put forward preliminary views for discussion. Of course, the basic principles are also applicable to other levels of clean rooms. In assessing the level of the cleanroom, it must be considered from three aspects: 1. The detection capacity of the particle counter, which is usually referred to as the sample volume, is insufficient; 2. The number of measurements or points is insufficient; 3. Measurement data assessment criteria. The following analysis and discussion. 1. On the minimum detection capacity of particle counters It has been found that large counters with large detection capacity and counters with small detection capacity have large differences in the measurement of high cleanliness (level 3 or higher). Recent foreign literature is also