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已制成截止波长16/μm具有接近理想热离子发射的暗电流特性的Ge_xSi_(1-x)/Si异质结內光发射红外探测器。由截止波长9.3μm的Ge_(0.44)、Si_(0.56)/Si探测器和单片CCD读出电路组成的400×400元焦平面阵列,在长波红外波段进行了成象演示,不经均匀性校正取得了高质量图象。
A Ge_xSi_ (1-x) / Si Heterojunction Internal Light Emitting Infrared Detector having a cutoff wavelength of 16 / μm has a dark current characteristic close to the ideal thermionic emission. A 400 × 400 focal plane array consisting of a Ge_ (0.44), Si_ (0.56) / Si detector with a cutoff wavelength of 9.3 μm and a single CCD readout circuit was used to perform imaging demonstrations in the longwave infrared band without uniformity Correction achieved high quality image.