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利用磁控溅射法制备出不同成分的(VAl)_(1-x)Ta_xN涂层,用X射线衍射、扫描电镜、原子力显微镜表征涂层微观结构,利用纳米压痕仪和摩擦磨损试验机测试了Ta含量对涂层的力学性能和摩擦磨损性能的影响。研究表明:Ta含量x≤0.31时,涂层为(111)结构,且硬度较低;当x≥0.57时,(111)结构完全消失,涂层呈现(200)择优取向,此时涂层变得较为致密,硬度和模量均得到明显提升,韧性也有显著提高。摩擦磨损实验表明Ta含量的增加能够降低涂层的摩擦系数,但同时也会增大涂层的磨损率。
The (VAl) _ (1-x) Ta_xN coatings with different compositions were prepared by magnetron sputtering. The coating microstructure was characterized by X-ray diffraction, scanning electron microscopy and atomic force microscopy. The effect of Ta content on the mechanical properties and friction and wear properties of the coatings was tested. The results show that the coating is (111) structure and the hardness is low when the content of Ta is less than or equal to 0.31. The structure of (111) completely disappears when x≥0.57, and the coating exhibits the preferential orientation of (200) Get more dense, hardness and modulus have been significantly improved, toughness has also significantly improved. Friction and wear experiments show that the increase of Ta content can reduce the friction coefficient of the coating, but also increase the wear rate of the coating.