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有许多方法可以检验波面的变形量,其中干涉法是应用比较多、比较成功的一种。干涉法也有许多种,其中有一种是不需要参考镜面的横向剪切干涉仪,也称横向切变干涉仪或横向错位干涉仪,它的应用范围比较广泛,结构小巧,使用方便,是一种新型的干涉仪。本文主要结合我们的工作体会,介绍一下棱镜式横向剪切干涉仪中的几个问题。一、结构和原理检验会聚波面变形量的横向剪切干涉仪有好几种形式,这里仅介绍我们常用的一种。它
There are many ways to test the deformation of the wave surface, of which the interferometry is a more applied and more successful one. There are many kinds of interferometry. One of them is a transverse shearing interferometer that does not need reference mirror, also known as transverse shear interferometer or transverse dislocation interferometer. It has a wide range of applications, compact structure, easy to use, is a New type of interferometer. This article mainly combined with our work experience, to introduce a few problems in the prism transverse shear interferometer. First, the structure and principle Convergence wavefront deformation horizontal shearing interferometer has several forms, here only introduce one of our commonly used. it