一种新的诊断工具有可能使亚微米VLSI器件样品的调试时间减少数周,这就是美国SentrySchlumberger公司的集成诊断系统IDS 5000。该系统使用一个电子束探针,并将来自于一个复杂的VLSI芯片的CAD连接表(netIist)数据与该芯片的实际显微图象结合起来。IDS 5000的Unix A new diagnostic tool is likely to reduce the commissioning time for submicron VLSI device samples by several weeks, the IDS 5000, an integrated diagnostics system from Sentry Schlumberger in the United States. The system uses an electron beam probe and combines CADI net data from a complex VLSI chip with the actual microscopic image of the chip. IDS 5000 Unix