用溶胶凝胶法在SiO2 基片上提拉制备了掺Er3 + ∶Al2 O3 光学薄膜。采用扫描电子显微镜、原子力显微镜、差热热重分析仪、X射线衍射仪研究了掺Er3 + ∶Al2 O3 光学薄膜的形貌和结构特性。在 90 0℃烧结后 ,SiO2 基片上提拉 15次形成厚度 8μm掺摩尔比 0 .0 1Er3 + 的面心立方结构γ Al2 O3 薄膜具有明显 (110 )择优取向 ,掺摩尔比 0 .0 1Er3 + 对γ Al2 O3 的晶体结构和结晶生长过程未产生显著影响。薄膜具有均匀多孔结构 ,平均粒径为 30～ 10 0nm ,平均孔径为 5 0～ 10 0nm ,表面起伏度为 10～ 2 0nm。掺摩尔比 0 .0 1Er3 + ∶γ Al2 O3 薄膜 ,获得了中心波长为1.5 34μm(半峰全宽为 36nm)的光致发光谱。 The Er3 +: Al2O3 doped optical films were prepared by sol-gel method on SiO2 substrates. The morphology and structure of Er3 +: Al2O3-doped optical thin films were studied by scanning electron microscopy, atomic force microscopy, DTAH and X-ray diffraction. After sintering at 90 ° C, the surface-grained cubic γAl 2 O 3 thin film with a thickness of 8μm with a thickness of 8μm was pulled 15 times on the SiO2 substrate with a preferential orientation of (110) and a molar ratio of 0.01Er3 + There is no significant effect on the crystal structure and crystal growth of γ Al 2 O 3. The film has a uniform porous structure with an average particle diameter of 30 to 100 nm, an average pore diameter of 50 to 100 nm and a surface roughness of 10 to 200 nm. With the molar ratio of 0. 0 1Er3 +: γ Al2 O3 thin film, a photoluminescence spectrum with a central wavelength of 1.5 34 μm (full width at half maximum of 36 nm) was obtained.