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本文讨论了用ＭＩＱ－１５６四极ＳＩＭＳ仪器对ＡｌｘＧａ（ｌ－ｘ）Ａｓ中Ｓｉ进行定量分析的实验方法，考察了测量结果的重复性及ｘ变化时ＳｉＲＳＦ的变化规律，在ＩＭＳ－４ｆＳＩＭＳ仪器上进行了对比测试，用Ｃｓ＋源对（２９）Ｓｉ的原子检测限达到４×１０（１５）ｃｍ（－３）．
In this paper, the experimental method for the quantitative analysis of Si in AlxGa (1-x) As with the MIQ-156 quadrupole SIMS instrument has been discussed. The repeatability of measurement results and the change rule of SiRSF during x change have been investigated. On the IMS-4fSIMS instrument The detection limit of (29) Si with Cs + source is 4 × 10 (15) cm (-3).