本文是一篇综述性报告。根据近年来的有关报道，结合作者的实验结呆，对ＩＯ、ＩＴＯ透明导电薄膜的研究情况和实验方法作了简要的评述，重点讨论了其电学性能和光学性能及影响它们的主要因素，分析了透过率峰位移随膜厚的变化关系，等离子体共振吸收峰与载流子浓度的依赖关系及紫外范围吸收限的位移与跃迁能隙的关系等，为进一步深入研究和制备优质透明导电薄膜提供参考。 This article is a summary report. According to reports in recent years, combined with the author’s experimental results, the research situation and experimental methods of IO and ITO transparent conductive thin films are briefly reviewed. Their electrical and optical properties and the main factors affecting them are discussed in detail. In order to further study and prepare high-quality transparent conductive materials, the relationship between peak shift and film thickness, the dependence of plasma resonance absorption peak and carrier concentration, the relationship between the shift of absorption in UV range and transition energy gap, Film for reference.