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利用TEM上的X光能谱仪可以对薄试样的微区成分进行分析。目前主要的定量分析方法是实验K因子法和理论K因子法。实验K因子的定义为: K_(AB)=C_A/C_B/I_A/I_B这里,C_A、C_B是合金试样中A、B元素的已知重量百分比,I_A、I_B是测量得到的A、B元素的x射线强度。文献给出了Cliff和Lorimer在入射电压E_0=100kV、使用EMMA-4测得的原子序数Z=11-50之间的元素K_α-K_α线系的17个K_实值和L_α-K_α线系的5个K_实值,以及Goldstein et al,的对元素K_α线系的理论计算K_理值。从目前的分析看,每个仪器应有自己的一套K_实。实验K因子法使用不方便。而K_理对同一线系的分析,除了Na、Mg、Al外结果较好,但对不同线系如K、L线系分析,其相对误差可达>30％。
Using the X-ray energy dispersive spectrometer on TEM, the micro-zone composition of thin samples can be analyzed. At present the main quantitative analysis method is the experimental K factor method and the K factor method. The experimental K factor is defined as: K_ (AB) = C_A / C_B / I_A / I_B where C_A and C_B are the known weight percentages of A and B elements in the alloy sample, I_A and I_B are the measured A and B elements X-ray intensity. The literature gives 17 K_values and L_α-K_α lineages of the elemental K_α-K_α line of Cliff and Lorimer with an incident voltage of E_0 = 100 kV and an atomic number of Z = 11 to 50 using EMMA-4 The five K_ real values, and the theoretically calculated K_thickness for the element K_α line of Goldstein et al. From the current analysis, each instrument should have its own set of K_ real. Experimental K factor method is not convenient to use. However, K-theory analysis of the same line system, except Na, Mg, Al results better, but for different lines such as K, L line analysis, the relative error of up to> 30%.