Amorphization in the Fe/Hf multilayered films was achieved by Ar+ ion beam assisted deposition (IBAD) technique. The Ar+ ion energy used was from 4 to 12 keV. Several amorphous alloys were obtained in Hf-rich films and their compositions were located in a range of 50~80 at pct Hf. The amorphization mechanism was also discussed. Amorphization in the Fe / Hf multilayered films was achieved by Ar + ion beam assisted deposition (IBAD) technique. The Ar + ion energy used was from 4 to 12 keV. Several amorphous alloys were obtained in Hf-rich films and their compositions were located in a range of 50 ~ 80 at pct Hf. The amorphization mechanism was also discussed.