一、工作原理 利用高速的蒸汽流将被抽气体进行几次压缩后,由前级泵排出,从而使被抽容器获得高真空。 当前级泵建立起必要的子真空后,具有低蒸汽压的扩散泵油开始由电炉加热。产生的油蒸汽分别从四级喷咀,定向高速喷出。被抽气体首先扩散到一级喷咀的蒸汽流中,随着蒸汽流向下运 First, the working principle The use of high-speed steam flow will be pumping gas compressed several times, the former stage pump discharge, so that the container was drawn to a high vacuum. After the current stage pump establishes the necessary sub-vacuum, diffusion pump oil with a low vapor pressure starts to be heated by the electric furnace. The resulting oil vapor from four nozzles, directional high-speed spray. The evacuated gas first diffuses into the steam flow of the first stage nozzle and flows downward as the steam flows